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We have conducted a soft X-ray emission spectroscopy (SXES) and a photoemission electron microscopy (PEEM) study on the heat-treated Ti/4H-SiC system. This spectro-microscopy approach is an ideal surface and interface characterization techniques due to the non-destructive nature of SXES and the real-time surface imaging of PEEM.The Si L 2,3 and C K soft X-ray emission spectra, which...
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