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An innovative approach for the numerical study of spontaneous adhesion (or stiction) phenomena in Micro-Electro-Mechanical Systems (MEMS) is proposed, based on the use of 3D Finite Element (FE) models. Stiction is a major reliability problem in MEMS which can completely destroy the normal mobility of parts which have the task e.g. to sense the external acceleration in micro-accelerometers or the rotation...
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