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We present a monitoring strategy based on using two pieces of witness glass, which are brought to the measuring position in a specially chosen sequence, each witness glass is monitored by one single wavelength. To reduce the thickness error, some thick layers are divided into two layers and monitored by different witness glasses. Theoretical analysis and experimental results have demonstrated that...
The laser-induced damage of Ta 2 O 5 films annealed at a wide range of temperature (473–1273K) at the laser wavelengths of 1064 and 355nm was investigated. The relations between microstructure, optical properties, chemical composition, absorption and laser-induced damage threshold (LIDT) were studied. The dependence of a damage mechanism on laser wavelengths was discussed. It was found...
The TiO x thin films were prepared by electron beam evaporation using TiO as the starting material. The effect of the annealing temperature on the optical and electrical properties was investigated. The spectra of X-ray photoelectron spectroscopy reveal that Ti in the films mainly exist in the forms of Ti 2+ and Ti 3+ below 400°C 24h annealing. The charge transfer between different...
With the present work we tried to study the effective methods to improve the laser-induced damage threshold (LIDT) and reflectance of HR coatings at 355nm. The work presented in this paper was part of an ongoing study about vacuum annealing. It was dedicated to study the effects of vacuum annealing with different temperature gradients on the structure, optical properties and laser-induced damage threshold...
Some results of an investigation on the layer thickness uniformity of glancing angle deposition are presented. A zirconia monolayer has been deposited by glancing angle deposition to analyze the layer thickness uniformity. The experimental results indicate that the thickness variation over the substrate is less than 0.1%, which is considered as good uniformity. It is found that the non-uniformity...
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