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HfO 2 is one of the most important high refractive index materials for depositing high power optical mirrors. In this research, HfO 2 thin films were prepared by dual-ion beam reactive sputtering method, and the laser-induced damage thresholds (LIDT) of the sample were measured in 1-on-1 mode for laser with 1064nm wavelength. The results indicate that the LIDT of the as-grown sample...
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