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Magnetic and chemical properties of Mn-implanted surfaces of a GaAs substrate were investigated using a magnetic force microscope (MFM) and X-ray photoemission spectroscopy (XPS). The Mn implanted region was changed to a grain structure after annealing at 840°C for 10s, and ferromagnetic characteristics were observed in each grain. From the XPS spectra, it was found that implanted Mn was chemically...
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