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A novel CNT-cathode ionization gauge was developed in this work, and its vacuum metrological characteristics in different gases were studied systematically. A good measurement linearity between normalized ion current and gas pressure is achieved from 10−8 to 10−4 Pa in N2, H2, O2 and air, respectively, and the linear response region for He only lies in the range from 10−7 to 10−4 Pa. The lowest measureable...
In this work, carbon nanotubes (CNTs) cathodes were directly prepared on catalytic hastelloy substrates by chemical vapor deposition technique (CVD). The field emission properties of the CNTs cathode were estimated under an ultrahigh vacuum system with a diode structure. The results showed that the present cathode has excellent emission stability with a high current density. Subsequently, this cathode...
The ionization gauge with carbon nanotube (CNT) cathode has many advantages such as low power consumption, fast response, small volume and free of thermal and light radiation etc, which are favorable for the measurement of extremely high vacuum. In this work, the CNT cathodes were grown on silicon substrate by thermal chemical vapor deposition (CVD), and the metrological characteristics of spherical...
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