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ZnAl2O4 and MgAl2O4 thin films were grown on Si(100) and quartz plate substrates using a photochemical method in the solid phase with thin films of β-diketonate complexes as the precursors. The films were deposited by spin-coating and subsequently photolyzed at room temperature using 254nm UV light. The photolysis of these films results in the deposition of metal oxide thin films and fragmentation...
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