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We have developed a double-ended anode coaxial magnetron pulsed plasma (DCMPP) for the purpose of coating fine ceramics with, for example, titanium nitride (TiN) on the inner surface of a narrow insulated tube by reactive sputtering. In the magnetron pulsed plasma, the magnetron effect and J × B plasma transport by a pulsed discharge occurred simultaneously. Discharge characteristics and optimum conditions...
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