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Nanostructured TiO 2 films on Si (100) substrates have been grown by nanosecond pulsed laser deposition at the wavelengths of 266, 355 and 532 nm using a Q-switched Nd:YAG laser and TiO 2 sintered rutile targets. The effect of laser irradiation wavelength, the temperature of the substrate and the presence of O 2 as background gas on the crystallinity and surface structure of...
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