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There are more and more sophisticated sensors in microsystem applications, which seem to rivet the engineers' attention. There is an extraordinary variety of sensors types which includes pressure, temperature, acceleration processing, optical, magnetic, chemical etc. In a number of sensors the critical sensing element most often is made of a silicon. The mechanical properties of silicon are outstanding...
In this paper we discuss first realization and preliminary parameters of the electronoptics MEMS column equipped with a field-emitting electron gun and an Einzel lens. The column is made in a form of the sandwiched silicon stack. Silicon elements are deep wet micromachined and placed in a polymer 3D printed holder. Cathode is made of carbon nanotubes deposited by use of the electrophoretic process...
A new optical MEMS silicon pressure sensor for use in high temperature (up to 450°C) and high radiation environments has been developed. Preliminary tests of the pressure sensor integrated with the components of the optical detection system and software has showed accurate detection of pressure by purely optical system.
In this article a concept of the fully, on-a-chip, integrated MEMS electron microscope and high vacuum MEMS micropump is discussed. The device is formed as a multilayer sandwich of anodically bonded glass/silicon part. The “active” part contains field emitting CNT electron source with proper configuration of electrodes forming an electron beam. Electron beam hits a thin membrane, passes through sample,...
A miniature ion-sorption magnetic-field-enhanced glow-discharge MEMS (Micro-Electro-Mechanical System) vacuum pump has been shown. The 12×20×3.4 mm3 micropump is made of silicon and glass. Fabrication process includes several typical deep micromachining procedures followed by multilayer sandwich anodic bonding sealing of machined parts. The pump, with dead volume of circa 0.08 cm3, is able to pump...
In this work for the first time, we report micro-cytometer equipped with miniature vacuum field emission light source (FELS) for fluorimetric measurements and able to carry on transmission/absorption measurements in VIS/NIR spectra. FELS sources utilizes cold electron field emission phenomena from carbon nanotubes. They are working on wavelengths adjusted to fluorescent markers used in biochemical...
In the paper, a new field-emission miniature light source has been presented. Fabrication process of the nanopowdered phosphors and cleaning method of the multi-walls carbon nanotubes has been described. XRD spectrum of carbon nanotubes, cathodoluminescence spectra of nanocrystalline phosphors, and current-voltage characteristics of field emission from carbon nanotubes cathodes have been presented
In the paper, a new idea of utilizing of the field-emission miniature light sources in microfluidics has been presented. We used YAG and Y2O3 based nanocrystalline phosphors fabricated by sol-gel method. Very good agreement of spectral characteristics of light emitted by field sources with very narrow absorption peaks of fluorophors used in biochemical analyses has been obtained
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