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Do badania kształtów wykorzystywane są różne techniki pomiarowe. Wybór konkretnego typu urządzenia zależy od wielu parametrów, takich jak wielkość i stopień skomplikowania kształtu mierzonego obiektu, jego budowa, żądany czas pomiaru oraz wymagana dokładność. Niniejszy artykuł przedstawia metodykę szybkiego skanowania z wykorzystaniem sensorów konfokalnych, przy czym główny nacisk położono na zminimalizowanie...
A surface profile measurement system for scanning the area of 100 mm x 100 mm with the lateral accuracy of 0.1 žm and height accuracy of 50 nm is presented. A confocal element has been used as a measurement head. This paper describes the methodology and the instrumentation including the calibration procedure and a discussion of accuracy.
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