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Warstwy tytanianu baru o grubości rzędu 100 nm wytworzone zostały na podłożach krzemowych (Si (100) typ n, p = 1 - 20 Ω cm) technikami ablacji targetu BaTiO3 + La2O3 (2% wt.) w plazmie impulsowej oraz rozpylania w plazmie o częstotliwości radiowej (13,56 MHz). Powłoki zostały scharakteryzowane metodami badania ciała stałego, takimi jak: skaningowa mikroskopia elektronowa (SEM), mikroskopia sił atomowych...
Atomic force microscopy is used to estimate and compare surface morphology of the carbon coatings, prepared using radio frequency plasma chemical vapor deposition, pulsed cathodic arc discharge, ion-beam deposition and hot-filament chemical vapor deposition. The difference in the surface structure was mentioned for each method of deposition. The influence of the surface morphology on the film properties...
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