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This paper presents the results of analysis and optimizing a MEMS electrostatic microactuator. Although, variable kinds of MEMS microactuators have built but the most commonly used ones are electrostatic micromotors. In this paper, a practical design for a variable capacitance electrostatic micromotor has been analyzed using a two-dimensional numerical finite element method. Optimization the micromotor...
This paper presents the results of analysis and optimizing a MEMS electrostatic microactuator. Although, variable kinds of MEMS microactuators have built but the most commonly used ones are electrostatic micromotors. In this paper, a practical design for a variable capacitance electrostatic micromotor has been analyzed using a two-dimensional numerical finite element method. optimization the micromotor...
In this paper, an approach for minimizing the torque ripple of a variable capacitance electrostatic micromotor is presented. To this end, a practical design for a variable capacitance electrostatic micromotor has been analyzed using a two-dimensional, numerical, finite element method. The procedure presented here for minimizing the torque ripple consists of two stages: optimization of the excitation...
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