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The process of plasma chemical conversion of isotopic enriched 98MoF6 in RF (13.56 MHz) capacitive-coupled and arc discharges was investigated. In both types of discharges the formation of metal (bulk) and powder nano-dispersed molybdenum as well as of fluoromolybdens of 98MoFn fluorides was found. The mechanism of plasma chemical reduction of 98MoF6 by hydrogen under considered experimental conditions...
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