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With the use of 18keV Cs + mass-filtered primary beam of 500nA focused into a spot ~30μm, rastered over a nominal area of 50μmx50μm and a pressure in the analysis chamber lower than 2x10 -8 Pa during analysis we were able to achieve an oxygen background (bkg) equivalent to 8x10 15 cm -3 . This means that, provided adequate reproducibility of comparative...
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