The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A voltage controlled resonance frequency tuning mechanism, capable of effecting 1,500 ppm frequency shifts or more, is demonstrated for the first time on an AlN capacitive-piezoelectric resonator. The key enabler here is a compliant top electrode suspension that moves with applied voltage to effectively vary capacitance in series with the device, hence changing its series resonance frequency. Capacitive-piezoelectric...
The third-order intermodulation distortion in properly terminated high-order bridged clamped-clamped beam (CC-beam) channel-select micromechanical filters has been measured for the first time and found to be appreciably higher than seen on unterminated stand-alone CC-beams. In particular, a three-resonator bridged 8-MHz filter with 140nm gaps posts a measured IIP3 of 25dBm and 36dBm for two-tone offsets...
A capacitive-piezoelectric (also known as, capacitive-piezo) transducer that combines the strengths of capacitive and piezoelectric mechanisms to achieve a combination of electromechanical coupling and Q higher than otherwise attainable by either mechanism separately, has allowed demonstration of a 1.2-GHz contour-mode aluminum nitride (AlN) ring resonator with Q > 3000 on par with the highest...
The use of capacitive-piezoelectric transducers, formed by separating a piezoelectric structure from its electrodes by sub-micron gaps, has raised the measured quality factor of aluminum nitride (AlN) Lamb wave resonators (LWR) from the ∼1,000 of typical square-edged conventional devices (with contacting electrodes) to over 5,000 at 940 MHz, posting the highest reported Q for non-overmoded pure AlN...
A “capacitive-piezo” transducer that separates a piezoelectric resonator from its electrodes via small gaps to eliminate resonator-to-electrode loss while maintaining strong electromechanical coupling, has enabled demonstration of a 50-MHz wine-glass disk (WGD) resonator array with Q=12,748. This is higher than exhibited by any sputtered thin-film AlN resonator measured to date at any frequency and...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.