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Approximately 200nm thick ZnO:Al films with high visible and infrared transmittance properties were prepared on glass substrates by the pulsed filtered cathodic arc technique and rapid thermal annealing. The as-deposited and annealed films have a poly-crystalline hexagonal wurtzite type structure. As the annealing temperature increases from 500°C to 650°C, the visible transmittance remains nearly...
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