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Vertical cavity surface emitting lasers with large aperture were fabricated by using wet oxidation technique at about 420°C, and the device chips were packaged with three different packaging methods. The optical output power and wavelength shift of the devices were compared experimentally. The device bonded with diamond spreader shows the best performance, and 200μm-diameter device produces a room...
We report the fabrication of a novel high-power VCSEL with reticular electrode in this letter. The analysis shows that the reticular electrodes can improve the homogeneity in the injected current and heighten VCSEL optical output power. The high-power reticular electrode VCSELs with 500μm aperture have been made and tested. Testing results show the slope efficiency of 0.75mW/mA, output power of up...
A new device structure is reported to improve performance of vertical cavity surface-emitting lasers (VCSELs). Namely many cylindrical holes (CH) or noncontiguous ring trench (NRT) are etched instead of the conventional ring trench (RT). The mesa with such new structure offers radial bridges for current injection, the connecting Ti-Au metal between ohmic contact and bonding pad does not have to cross...
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