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The SOI LDMOSFETs with step doping profiles in drift region have been experimentally investigated. Uniform, single-step and two-step doped drift regions have been designed and fabricated on a same bonded SOI wafer with the top silicon layer of 3 mum and buried oxide layer of 1.5 mum. The experimental devices with two-step doping profile have a breakdown voltage in access of 250 V and specific on-resistance...
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