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Macroporous ceramic thick films consisting of nanosized particles have been fabricated successfully by a modified sol-gel method employing polymethylmethacrylate (PMMA) microspheres as a template. PMMA microspheres with a uniform particle size (mean diameter: 870 nm) were first deposited on an oxidized silicon substrate. Precursor solutions of Ti(i-C 3 H 7 O) 4 in isopropyl...
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