The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
An integrated Total-NOx-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NOx in air. It consists of a Micro-Electric-NOx-Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NOx is treated with a corona-discharge. Then, in the TGS, the treated NOx is detected by using a catalytic reaction and a thermoelectric effect. The fabricated...
A demand for moving from batch immersion tools to single-wafer spin tools has been increasing in the advanced semiconductor manufacturing. But high-dose ion-implanted resist removal using a conventional single-wafer spin tool is very difficult. This paper reports an advanced single-wafer spin-cleaning system with combination of dry ashing and moderate-temperature wet cleaning by implementing an atmospheric...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.