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In this study, the CrAlSiN films were first synthesized using the cathodic arc evaporation system with Cr (99.99at.%) metal and Al 88 Si 12 alloy dual cathodes. The films then underwent heat treatments at different temperatures of 400, 600, and 800°C for 3h in a nitrogen atmosphere. Microstructures of the heat-treated films were analyzed with X-ray photoelectron spectroscopy, X-ray...
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