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Although many modeling approaches exist for analyzing the behavior of capacitive micro-machined ultrasonic transducers (CMUTs), the relation equation between the design parameters with input and output is still lacking. What there is can only be used to analyze the dynamic performance of CMUT indirectly and qualitatively, such as stiffness and sound pressure. A lumped-parameter theoretical model based...
Residual stress will be generated in capacitive micromachined ultrasonic transducer (CMUT) during standard CMOS fabrication process, which has great effect on the CMUT performance, such as collapse voltage, resonant frequency, transformer ratio, sensitivity and bandwidth. To meet the requirements of design and improvements of fabrication process, sufficient considerations for the effects of residual...
A novel capacitive micromachined ultrasonic transducer (CMUT) with dual-bottom-electrode based on standard CMOS and post-CMOS processes is presented. Compared to the traditional CMUT with single-bottom-electrode, the presented one has larger equivalent gap in emission and smaller air gap in reception for the membrane is biased much closer to the bottom electrode. A structure model is proposed for...
Capacitive micromachined ultrasonic transducer (CMUT) fabricated in standard CMOS and post-CMOS processes undergoes a series of thermal processes at about 1000degC. Thermal stress is generated in the membrane during such process. This paper studies the most severe influence of thermal stress on the performance of CMUT, such as stiffness, collapse voltage, resonant frequency, transformer ratio, coupling...
It is always difficult to optimize parameters of capacitive micromachined ultrasonic transducers (CMUT) because of high computational cost of Finite Element Method (FEM) analysis and prototype manufacturing cost. Thus a theoretical model is required in designing a CMUT. This paper presents such a 1-D theoretical model for CMUT reception, which makes it easier to optimize the parameters of the CMUT...
It is always difficult to optimize parameters of capacitive micromachined ultrasonic transducers (CMUT) because of high computational time cost of finite element method (FEM) analysis and economic cost of prototype manufacturing. Thus a theoretical model is required in designing a CMUT. This paper presents such a 1-D lumped model. A transfer function between output sound pressure and input AC voltage...
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