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ZrSiN film was selected as diffusion barrier of titanium porcelain interface and sputtered on polished titanium substrate with RF reactive magnetron sputtering. XRD, XPS and TEM results revealed that the ZrSiN diffusion barrier is a nano-composite that consists of nano-crystallite ZrN and amorphous-like SiN x phase. The results also showed that after simulated porcelain sintering thermocycles...
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