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This paper describes the development of high electromechanical coupling coefficient (K2) SAW resonator on a Ta2O5/Al/LiNbO3 structure for wide duplex gap application. We have cleared that the optimum Ta2O5 thickness which the high performance SAW resonator without Rayleigh-mode spurious response could be realized. Also, the Ta2O5 film has an advantage of decreasing the film thickness compared with...
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