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We synthesized silicon films (hydrogenated microcrystalline silicon in hydrogenated amorphous silicon) and silicon nitride films by electron-beam-induced-chemical vapor deposition combined with low-temperature H tunneling reactions on cooled substrates, which adsorb source gases (SiH 4 or Si 2 H 6 ). The photoconductivity of the silicon film was 0.7×10 −5 Ω −1 ...
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