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Piezoelectric thin films on high acoustic velocity nonpiezoelectric substrates, such as ZnO, AlN, or GaN deposited on diamond or sapphire substrates, are attractive for high frequency and low-loss surface acoustic wave devices. In this work, ZnO films are deposited on Al/sub x/Ga/sub 1-x/N/c-Al/sub 2/O/sub 3/ (0 /spl les/ x /spl les/ 1) substrates using the radio frequency (RF) sputtering technique...
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