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Precise microcoils and mesh pipes with outer and inner diameters of 100 μm and 60 μm were fabricated using laser‐scan lithography and electrolytic etching. Non‐magnetizable stainless‐steel (SUS304) pipes were coated with resist films, and helical patterns were delineated using a laser‐scan exposure system. Positive resist PMER P‐LA900 was used for fabricating microcoils, and negative resist PMER N‐CA3000...
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