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This work presents integration of two chip-scale real-time aerosol impactor stages within a miniaturized cascade assembly for airborne particulate size segregation and mass concentration measurement. Impaction stages, each comprised of a MEMS resonant microbalance, an impaction micro-chamber and a number of micro-nozzles, all integrated on a single chip, are fabricated using a three mask micromachining...
This work presents chip-scale integration of MEMS resonant mass balances along with aerosol inertial impactors (airborne micro/nanoparticle collectors). A three mask microfabrication process has been developed to produce the main components; mass balance, impactor nozzle, and impaction micro-chamber on a single SOI substrate. In addition to extreme miniaturization of a conventionally bulky setup and...
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