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The paper reports a hyper-branched polymer functionalized on resonant micro-cantilevers to detect trace-level chemical vapor of dimethyl methylphosphonate (DMMP, simulant of sarin). The hyperbranch-polymer with functional-groups is directly constructed onto cantilever-surface by layer-to-layer step-growing monomers with an A2+B4 composition, where A2 and B4 are complementary interaction-groups for...
A top-down formed four-cantilever micro-sensor structure is equipped with self-assembled dual monolayers on the surfaces for specific detection to trace explosive and depression of environmental cross-talk. Sensor design of the four-lever scheme, micro-fabrication, surface modification of the dual monolayers and experimental results for ultra-sensitive detection of explosive are sequentially related...
Presented is an ultra-sensitive piezoresistive SiO2 microcantilever sensor for trace TNT detection. A thin single crystalline silicon piezoresistor is encapsulated in a SiO2 cantilever for on-chip electric readout. The cantilever can lead to a more sensitive characteristic compared with conventional silicon cantilever because of a much lower Young's modulus of SiO2. Moreover, fully covered by SiO2...
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