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This paper reports an improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes. Different from conventional resonant accelerometer integrating with low-order vibrating resonators, our prototype utilizes higher-mode fishbone-shaped resonators based on the principle that higher vibration modes have a higher frequency sensitivity. The proposed fishbone-shaped...
In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity...
A micromachined resonant electrostatic charge sensor with enhanced responsivity by introducing dual single-stage micro-leverage mechanisms is presented. The sensor is based on the detection of resonant frequency shift of a single-crystal silicon double-ended tuning fork (DETF) element due to the axial compressive generated by the additional charge and transformed by the micro-levers. An analytic model...
Mechanosensitive (MS) ion channels play an important role in various physiological processes. Although the determination of the structure of mechanosensitive channel of large conductance (MscL) makes the simulation study possible, it has not so far been possible to directly simulate the gating mechanism of MscL in atomic detail. In this article, MscL has been studied via molecular dynamic (MD) simulations...
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