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A piezoelectric accelerometer based on d33 mode was studied in this work. It is comprised of multiple cantilever beams to support a central seismic mass. The piezoelectric PZT thin films and interdigital (IDT) electrodes are designed to be deposited on the surface of beams. The PZT thin film was in-plane polarized and worked in d33 mode. The accelerometer was fundamentally analyzed and designed by...
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