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Power management is a fundamental issue in wireless sensor networks. In this paper, a piezoelectric flow sensor is proposed for use as a wake-up switch in a wireless sensor node to reduce power consumption. A cantilever with a Pb (Zr,Ti) O 3 (PZT) thin film detects airflow changes surrounding the wireless sensor node. A prototype of the flow sensor is used to determine the relationship between...
A piezoelectric energy harvesting cantilever integrated with Si proof mass has been presented to realize a low resonant frequency of 35.8Hz. This paper describes the design, microfabrication and measurement of such device for harvesting energy from low frequency environmental vibrations. Instead of deposition of PZT bulk film, ten PZT thin film patterns (PZT patterns) are parallel arrayed and electrically...
A gold coated silicon mirror (5 mm × 5mm) actuated by piezoelectric Pb(Zr, Ti)O3 (PZT) cantilever beams has been investigated for variable optical attenuator applications. The device is micromachined from a SOI substrate with 5μm thick Si device layer, with multi-layers of Pt/Ti/PZT/Pt/Ti deposited as electrode materials. A large Si mirror plate and a 1×10 arrayed PZT cantilevers arranged in parallel...
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