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A novel actuation mechanism for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr, Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for 2-D raster scanning applications.
Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications.
A gold-coated silicon mirror (5 mm × 5 mm) driven by a piezoelectric Pb(Zr,Ti)O3 (PZT) beam with 1 × 10 cantilever actuators has been demonstrated for variable optical attenuator application. A dual-core-fiber collimator is aligned perpendicularly to the mirror in a three-dimensional light attenuation arrangement. Torsional attenuation based on the difference in the dc biasing voltage applied to the...
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