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This study reports a novel electrostatic vertical comb-drive micro-actuator (VCA) driven by the photovoltaic effect that results from the incident light. The vertical comb electrodes are composed of pn-junction structures (named PN-combs). The VCA with PN-combs can be driven by the photovoltaic effect and/or reverse electrical bias. The VCA with PN-combs was fabricated on an epitaxial silicon wafer...
This work demonstrated the concept of using "sequential engagement of comb electrodes" to improve the linearity and maximum deflection of vertical comb- drive actuator (VCA). This concept is achieved by varying the in-plane distribution of comb electrodes. The simulation and experiment results of VCA with four different electrode-distribution designs demonstrated the feasibility of this...
The vertical comb-drive actuator (VCA) is a promising component to drive analog as well as scanning micromirrors. This work demonstrates the concept of using ldquosequential engagement of vertical comb electrodesrdquo to improve the linearity and to maximize the deflection for analog micromirror. This concept is achieved by varying the in-plane distribution of comb electrodes. The simulation and experiment...
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