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In this paper is presented a fabrication process for obtaining refractive microlenses arrays with high reproducibility and low cost. This process was specifically optimized for the AZ4562 photoresist. Functional prototypes of microlenses arrays with dimensions in the range of 30μm, 4.9mm and 5μm for width, length and thickness, respectively, were fabricated and tested. The pre-thermal reflow spacing...
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