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Annealing effect of amorphous carbon thin films on Si(100) substrates is studied by normal incidence and angle dependent carbon K-edge X-ray absorption near-edge structure (XANES) spectroscopy. The angle dependence of the XANES signal shows that the graphitic basal planes are oriented perpendicular to the surface when the film is annealed at 1000°C. Micro-Raman spectroscopy reveals two well-separated...
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