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This paper reports a micromachined nano electrical mobility analyzer (nEMA) for nano- sized airborne particle classification. The micromachined nEMA is a particle classifier that uses both the inertia and electrical mobility of the particles for the classification. The microchannel of the nEMA is defined by silicon bulk micromachining. The collection efficiency of the solid particle, NaCl with a diameter...
We report design, fabrication and experimental results of a micromachined cascade virtual impactor with flow rate distributor for classifying airborne particles according to their sizes. The fabricated device consists of two components: a cascade virtual impactor for classifying particles according to their own inertia, and a flow rate distributor to maintain specific flow rates at each channel. Proposed...
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