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We conduct a systematic scaling analysis of the sensitivity of a silicon capacitive MEMS microphone based on a dimensionless 1-degree-of-freedom (1DOF) model considering residual stress. The theoretical normalized sensitivity we derived is a nonlinear function of normalized diaphragm size (h/a), acoustic driving frequency, 3 effective stiffness terms and the other parameters. From our 1DOF model,...
Residual stress during the micro-fabrication process has been one of the main issues in many MEMS/NEMS sensors and actuators, especially acoustic sensing. We conduct theoretical, numerical and experimental study on the residual stress effect on the frequency responses of two types of polysilicon micro circular resonators: clamped and residual stress (RS) free design which can release the process-induced...
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