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Silicon (Si) micro-trenches with large-area uniformity and tunable taped sidewalls were prepared using a metal-assisted chemical etching (MaCE) process. Systematical investigations on both dynamics and influences of HF/H 2 O 2 electrolytes for the etching of Si patterned with Au catalysts were performed. With the increased introduction of HF in catalytic etching, both the etched depths...
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