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Summary Small-angle diffuse X-ray reflection from a SiGe/Si multilayer has been studied theoretically and experimentally. The scattering process has been described by means of the DWBA method. For the description of the rough interfaces, the results of the Markov chain theory have been used. It has been demonstrated that the distribution of the diffusely scattered intensity in reciprocal plane gives...
Summary High-resolution X-ray diffraction (HRXRD) and triple-axis diffractometry (TAD) are used to investigate Si1−xCx epilayers and Sin/C/Sin superlattices. The samples were annealed in several steps to obtain information about their thermal stability. During annealing defects are formed in the epitaxial layers as well as in the substrates, leading to a contribution of diffusely scattered...
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