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This digest paper describes the experimental demonstration of two dimensional (2D) microscale ‘Chladni figure’-like patterns [1] of populations of microspheres in liquid using SiC micromechanical resonators. SiC square trampoline resonators (size: 50µm×50µm) exhibit appreciable high frequency multimode resonances when operating in liquid. We are able to manipulate relatively small (1.7µm in diameter)...
This digest paper describes experimental demonstration of high-frequency silicon carbide (SiC) microdisk resonators operating in aquatic environments, including water and water solutions of H2O2 and NH4OH. We demonstrate, for the first time, that center-clamped circular SiC microdisks can preserve multiple robust flexural-mode resonances in water. We have observed strong multimode responses in the...
Multimode resonators offer new opportunities for resonant sensing with multimodality and enhanced degrees of freedom. This digest paper presents experimental measurements of multimode resonances in ‘dog-bone’-shaped resonators made by Si CMOS-MEMS processes. We have measured >18 modes which include both out-of-plane and in-plane resonances. We compare multimode results from both photo-thermal and...
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