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We report on characterization of microsale lead zirconate titanate (PZT) thin film cantilevers, by both optical and electrical measurements, for up to the 7th resonance mode in 2kHz to 2MHz frequency range, with quality (Q) factors between 380 and 600. We also calibrate the PZT thin film's inverse piezoelectric coefficient (e31 ≈ −5C/m2). This work presents a multiphysical characterization of important...
This digest paper reports on the first high-frequency nanomechanical resonators based on molybdenum disulfide (MoS2) crystalline flakes freely-suspended on microtrenches (∼13µm wide and 14µm deep) fabricated on flexible substrate, with bendability and stretchability. Through investigations of the device resonances via optical excitation and detection by ultrasensitive laser interferometry, we first...
We demonstrate silicon carbide optomechanical microresonators with mechanical frequency up to 1.7GHz, mechanical quality above 5500 and optomechanical coupling around 100GHz/nm. The frequency can match the zero-field splitting of the defect spin in silicon carbide.
This paper explores the role of nanotechnology with focus on nanophotonics in dielectric, metal, and semiconductor inhomogeneous metamaterials and devices for optical communications, information and signal processing, and sensing.
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