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We report on characterization of microsale lead zirconate titanate (PZT) thin film cantilevers, by both optical and electrical measurements, for up to the 7th resonance mode in 2kHz to 2MHz frequency range, with quality (Q) factors between 380 and 600. We also calibrate the PZT thin film's inverse piezoelectric coefficient (e31 ≈ −5C/m2). This work presents a multiphysical characterization of important...
We report on measurement and modeling of dynamic energy harvesters based on oscillating piezoelectric cantilevers, along with careful calibration of energy conversion properties of such devices in their dynamic responses. We employ thin-film lead zirconate titanate (PZT)-based cantilevers fabricated by laser micromachining, with efficient proof masses enabled by a heavy alloy with a low melting temperature...
This digest paper presents experimental demonstration of new resonant nanoelectromechanical systems (NEMS) based on sub-100nm thin carbon nanofibers (CNFs) that are synthesized by using a plasma-enhanced chemical vapor deposition (PECVD) process. Beyond careful and extensive materials characterization of the CNFs, we have prototyped few-μm-long, cantilever-like CNF mechanical resonators with measured...
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