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We studied the annealing effect on the structural, optical, and electrical properties of sputtered CuAlO2 films. It is found that the crystallinity of CuAlO2 films is improved with increasing the annealing temperature in N2 ambient, and the film annealed at 900 °C presents the excellent preferred (001) orientation in X-ray diffraction patterns as well as Raman scattering signals, A1g and Eg. The optical...
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