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We report on characterization of microsale lead zirconate titanate (PZT) thin film cantilevers, by both optical and electrical measurements, for up to the 7th resonance mode in 2kHz to 2MHz frequency range, with quality (Q) factors between 380 and 600. We also calibrate the PZT thin film's inverse piezoelectric coefficient (e31 ≈ −5C/m2). This work presents a multiphysical characterization of important...
We report on experimental study and calibration of temperature coefficient of frequency (TCf) and laser heating effect in two-dimensional (2D) resonators, and through which, a new method for determining thermal expansion coefficient (α) in 2D crystals. We measure the resonance characteristics of the ‘drumhead’ nanomechanical resonators based on molybdenum disulfide (MoS2) using sensitive laser interferometry...
This digest paper reports on the first high-frequency nanomechanical resonators based on molybdenum disulfide (MoS2) crystalline flakes freely-suspended on microtrenches (∼13µm wide and 14µm deep) fabricated on flexible substrate, with bendability and stretchability. Through investigations of the device resonances via optical excitation and detection by ultrasensitive laser interferometry, we first...
This digest paper describes an experimental exploration of parametric resonance and amplification effects in a ‘dog-bone’-shaped bulk-mode resonator, enabled by CMOS-MEMS technology, by employing electrical excitation and optical detection. In the initially very stiff bulk-mode resonators where efficient parametric pumping is challenging, we have achieved linear resonance signal amplification with...
Multimode resonators offer new opportunities for resonant sensing with multimodality and enhanced degrees of freedom. This digest paper presents experimental measurements of multimode resonances in ‘dog-bone’-shaped resonators made by Si CMOS-MEMS processes. We have measured >18 modes which include both out-of-plane and in-plane resonances. We compare multimode results from both photo-thermal and...
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