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The chemical species exiting chamber after an aluminum chemical vapor deposition process using aluminum boro-hydride trimethylamine (ABHTMA) as a precursor were studied with a Fourier transform infrared spectroscope, which was installed in the exhaust line of the chamber. The variation in the absorption spectra of C–H, C–N, B–H, Al–H and Al–N stretching features and the morphology of the deposited...
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