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Hydrogenated carbon films were prepared from a highly ionized plasma beam source using acetylene. The films deposited at low temperatures have a very high sp 3 fraction, density, compressive stress and hardness. The sp 3 fraction, density and stress are found to fall sharply at about 530 K to values suggesting sp 2 bonding. The transition is believed to be associated with a...
A highly tetrahedral form of hydrogenated amorphous carbon (ta-C:H) with maximum density of 2.9 g cm -3 , sp 3 fraction of 0.75 and hardness of 61 GPa has been deposited from acetylene using a low pressure plasma beam source, The ion energy dependence of its properties suggests that the subplantation deposition model of a-C also describes the deposition of a-C:H.
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