The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
We describe a systematic study on quantifying the effects of heterostructure layer stacking upon measured dissipation and quality factors (Qs) of AlN-on-Si coupled-ring breathing mode micromechanical resonators. For the first time, we design and fabricate resonators of the same lateral dimensions but with different stacking layers, namely, Si, AlN-on-Si, and Al-on-AlN-on-Si. With both optical and...
We report on the first demonstration of electrothermally tunable graphene nanoelectromechanical resonators via Joule heating. We fabricate single-, bi- and tri-layer graphene resonators (up to 136MHz) to study electrothermal effects on resonance characteristics. The tri-layer graphene resonator exhibits frequency upshift from 9.5MHz to 26.1MHz by electrothermal heating, resulting in tuning range up...
We report on characterization of microsale lead zirconate titanate (PZT) thin film cantilevers, by both optical and electrical measurements, for up to the 7th resonance mode in 2kHz to 2MHz frequency range, with quality (Q) factors between 380 and 600. We also calibrate the PZT thin film's inverse piezoelectric coefficient (e31 ≈ −5C/m2). This work presents a multiphysical characterization of important...
This digest paper describes experimental demonstration of high-frequency silicon carbide (SiC) microdisk resonators operating in aquatic environments, including water and water solutions of H2O2 and NH4OH. We demonstrate, for the first time, that center-clamped circular SiC microdisks can preserve multiple robust flexural-mode resonances in water. We have observed strong multimode responses in the...
Multimode resonators offer new opportunities for resonant sensing with multimodality and enhanced degrees of freedom. This digest paper presents experimental measurements of multimode resonances in ‘dog-bone’-shaped resonators made by Si CMOS-MEMS processes. We have measured >18 modes which include both out-of-plane and in-plane resonances. We compare multimode results from both photo-thermal and...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.