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Monolithic fabrication of a GaInAsP/InP laser (LD) with a monitoring photodiode (PD) is described. LDs and PDs have etched facets fabricated by inclined reactive ion etching (RIE). The etched LD facing facet PD is perpendicular to the junction plane and the etched PD facet facing LD is inclined by 55 degrees to the plane by the 'windward-leeward effect' of the inclined RIE. Therefore, coupling efficiencies...
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